Ion & Electron Detection—SEM & FIB Detectors

El-Mul’s range of detectors for electron and ion beam systems bring together their core capabilities into gold-standard detection solutions for both system manufacturers and end-users looking to upgrade their instruments to take advantage of the latest technology. To download data please click on the text below:-

3Max is the first true innovation in Everhart-Thornley (ET) type chamber detectors in over 40 years. The patent-pending 3Max electrode arrangement captures SE3 electrons, dramatically increasing the SNR in difficult imaging conditions. 3Max brings new capabilities to the standard ET port and can, in some cases, eliminate the need for a separate BSE detector. For more information on 3Max click here.

ELION is the new dual standard for charged particle detection in FIB and dual beam FIB/SEM systems. Elion is the first commercial detection platform to combine SE and ion mode detection in a single device without compromising either mode. For more information on Elion click here.

SpectroMax in-lens detectors are designed for the most critical high efficiency, high resolution spectroscopic applications. SpectroMax separates SE from BSE to enable simultaneous topography and material contrast imaging at very low beam energies and in high resolution modes. SpectroMax detection efficiency approaches 100% for high angle BSE and SE at any beam energy—which is why SpectroMax serves as the EsB (Energy and angle Selective BSE) detector on all Carl Zeiss ULTRA FE and ULTRA CrossBeam FIB SEMs. For more information on SpectroMax click here.

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